The survey found that 323 new Internet companies were registered in Europe's largest economy in 2007, up from 97 in 2006 and 50 in 2005.
The startup total for 2007 was the highest in at least five years. Deutsche Startups' survey database only dates back to 2003.
Deutsche Startups Editor Alexander Huesing said he thinks German startup activity has reached its peak.
"The 2007 boom year won't be topped," he said. "But the number of startups (in 2008) will probably end up being significantly higher than it was in 2006."
The new companies were focused on online platforms for social communities and shopping websites, Deutsche Startups reported.
The German economy grew 2.5 percent in 2007, rounding off the strongest two-year burst of activity since the country reunified in 1990. Most analysts expect Germany's economic growth to slow to around 1.7 percent in 2008.